Field Emission Gun-Scanning Electron Microscope Laboratory (Zeiss Supra 40)
Phone : +91-3222-283288
Location : GF / MME Dept. Room No. 104, CRF
Facilitator :
Prof. Jyotsna Dutta Majumdar, Metallurgical & Materials Engineering
Email: jyotsna@metal.iitkgp.ernet.in, Contact:+91-3222-283288
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Objectives
Electron Microscopes are indispensable tools for today's nano technology,development and production. Field Emission Gun Scanning electron microscopes (FEG-SEM) deliver high resolution surface information and are widely used in many application fields such as:
The addition of analytical detectors enables full nano structural analysis. The SUPRA™ series, based on the 3rd generation GEMINI® column, offers a complete range of ultra high resolution FE-SEM models to cover all fields of applications in nano technology, cryo, nano structural materials analysis and semiconductor development and failure analysis.
People
Equipment Details
Field Emission Scanning Electron Microscope
Electron Microscopes are indispensable tools for today's nano technology,development and production. Field Emission Gun Scanning electron microscopes (FEG-SEM) deliver high resolution surface information and are widely used in many application fields such as:
The addition of analytical detectors enables full nano structural analysis. The SUPRA™ series, based on the 3rd generation GEMINI® column, offers a complete range of ultra high resolution FE-SEM models to cover all fields of applications in nano technology, cryo, nano structural materials analysis and semiconductor development and failure analysis.
Field Emission Scanning Electron Microscope
Essential Specifications |
|
Magnification |
12-10,00,000 x |
Emitter Thermal field emission type Acceleration Voltage |
1.5-30kV |
Probe Current |
4 pA-10nA(40 nA Optional) |
Standard Detectors |
ZEISS High efficiency In-lens detector
|
Operations |
High Magnification particle analysis
|
Utility and Working Principal
FESEM is the abbreviation of Field Emission Scanning Electron Microscope. A FESEM is microscope that works with electrons (particles with a negative charge) instead of light. These electrons are liberated by a field emission source. A field-emission cathode in the electron gun of a scanning electron microscope provides narrower probing beams at low as well as high electron energy, resulting in both improved spatial resolution and minimized sample charging and damage. For applications that demand the highest magnification possible, it also offers In Lens SEM.The object is scanned by electrons according to a zig-zag pattern. A FESEM is used to visualize very small topographic details on the surface or entire or fractioned objects. Researchers may apply this technique to observe structures that may be as small as 1 nanometer (= billion of a millimeter). The FESEM may be employed for example to study organelles and DNA material in cells, synthetical polymeres, and coatings on microchips.
Sample Details
Field emission scanning electron microscopy (FESEM) provides topographical and elemental information at magnifications of 10x to 300,000x, with virtually unlimited depth of field. Compared with conventional Scanning Electron Microscope(SEM) field emission SEM (FESEM) produces clearer, less electrostatically distorted images with spatial resolution down to 1 1/2 nanometers – three to six times better.
Other advantages of FESEM include: